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Preclude Photoresist Detector for 200mm PVD Degas Chambers
Detects photoresist in PVD tool degas chambers, mitigating contamination that can cause costly downtime and extensive clean-up.
The INFICON Preclude Photoresist Detector continuously polices degas chambers and detects wafers contaminated with photoresist in PVD cluster tools.
Preclude scans each wafer as it is degassed and sounds an alarm when even trace amounts of photoresist compounds remain on a wafer due to an incomplete or missed strip. A signal from the high-sensitivity sensor can be used to automatically shutdown a cluster tool to contain damage and avoid costly yield problems.
Proven reliable during extensive testing on production tools, the Preclude Photoresist Detector can help eliminate the effects of catastrophic tool contamination. This results in reduced tool downtime for venting and cleaning. Preclude can also decrease film deposition problems due to very small amounts of photoresist remaining on the wafer.
ASSOCIATED TECHNICAL INFORMATION:
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