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Transpector IPM Gas Analysis System
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Automated Monitoring and Diagnostics System for High Vacuum Chambers
The INFICON Transpector® Integrated Process Monitor (IPM) is an automated monitoring and diagnostics system for high vacuum chambers. Transpector IPM is built upon the Transpector RGA technology and is fully integrated into the process tool.
Many wafer and display panel manufacturing processes place extreme demands on vacuum quality and integrity. Transpector IPM provides very sensitive residual gas analysis and is designed for accurate and repeatable measurements during high volume manufacturing. Furthermore, the Transpector IPM takes the guesswork out of spectral interpretation. Monitoring, data acquisition, and data analysis are completely automated.
General Applications:
- Helium leak checking
- Continuous air leak monitoring
- Contamination detection
- Base vacuum qualification
Features at a Glance:
- 100 AMU mass range with a combination Faraday cup / electron multiplier
- Automatic EM gain adjustments
- Nine decades of dynamic range
- Automatic tuning of mass position and resolution
- Variable dwell times for superior signal-to-noise ratios
- MDPP of 5E-15 Torr
ASSOCIATED TECHNICAL INFORMATION
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Application Note - Transfer Chamber Monitoring / 200mm and 300mm PVD Cluster Tools
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Transpector CPM - Integrated Process Monitor for 300mm High Pressure Degas
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